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WetAlyzer-NLTM

Automated In-Line Chemical Analysis with Periodic Cross Reference for Wet Process Control.

Real-time chemical visibility directly at the process tool.

 

 

Engineered for High-Performance Control 

WetAlyzer NLTM is built to maximize measurement performance while minimizing impact on uptime, process integrity, and operational cost.
From non-contact integration to automated verification, every element is designed to support stable production with minimal intervention.
Enabling better decisions with fewer resources.

Design for wet process control in Advanced Packaging, BEOL, and FEOL applications. 

WetAlyzer NL™ performs non-contact chemical monitoring using ClampIt™, a non-contact flow cell, directly on existing tool lines while minimizing chemical consumption, reducing contamination risk, and eliminating chemical exposure.

WetAlyzer-NLTM

Fast and Precise Results

Fast and Precise Results
Rapid chemical concentration measurement at the tool.

Built-In Verification and Calibration

Built-In Verification and Calibration
Provides dual-layer certainty through Grab and additional automated verification methods.

Non-Contact Chemical Monitoring

Non-Contact Chemical Monitoring
Non-contact monitoring without fiber cutting and with minimal chemical waste.

Operator-Friendly Architecture

Operator-Friendly Architecture
Compact, tool-side system with front access, effortless maintenance, and optimized COO.

Applications and System Capabilities 

Typical Applications 


  • BEOL Formulated Chemistries

  • Advance Packaging Cu Etch

  • Advance Packaging PR Strip

  • Hot Phosphoric Acid Monitoring

  • Cu/Ti Etch Monitoring

  • SC1, SC2 Point of Use 

  • IPA Monitoring

System Features 

  • Compact and cost-effective

  • Spectral measurement using NIR or UV

  • Optional electrochemical verification method

  • Cabinet-based modular system

  • Front access architecture

  • Supports monitoring of up to two tanks

  • Fab design with S2/S8 compliance

  • Upgradable

Metrology Is Our Heart.  
Accuracy Is Our DNA.

Key Questions. Clear Answers.

2
Can the system be installed without modifying the process tool?


Yes. ClampIt™ mounts easily on existing chemical lines without cutting pipelines.


It enables continuous measurement with no contamination risk, ensuring minimal downtime and full process integrity.

How is measurement accuracy maintained over time?
How is measurement accuracy maintained over time?

The system combines automated calibration with built in verification, including standards based verification and optional grab sampling.

This dual-layer approach ensures stable, repeatable data and long-term measurement accuracy under changing process conditions.

Wafer
How is chemical concentration measured directly at the tool?

WetAlyzer NL uses spectral analysis to measure chemical concentration in real time on the recirculation line.

ClampIt™ enables non contact integration directly on existing chemical lines, allowing measurement without opening the line or introducing new contact points.

This ensures continuous monitoring under real process conditions with minimal disruption and no manual sampling. 

Contact Us!

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Where to find us? 

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