Advanced Process Analysis for Tight Process Control

Growing wet process complexity requires immediate, accurate chemical concentration monitoring to maintain tight process control while minimizing cost of ownership.

WetSpec+™ is an integrated wet process monitoring platform that brings together multiple analyzers into a single monitoring environment, providing immediate access to critical process parameters for faster analysis, easier operation, and tight process control.

Operators gain real-time visibility into the exact concentration of bath components across multiple process streams, enabling faster process decisions while eliminating manual data collection and offline analysis.

Built on decades of semiconductor metrology expertise, WetSpec+ delivers accurate, repeatable measurements and continuous monitoring under real fab operating conditions.