How is measurement consistency maintained across chambers and over time?
Equi T is an in situ radiometric calibration source designed for NTM systems.
It provides rapid warm up, long term stability, and calibration verification for chamber matching, maintenance, troubleshooting, and tool to tool consistency across production environments.
How is measurement accuracy maintained over time?
The NTM Series is designed for exceptional long-term measurement stability, minimizing the need for frequent recalibration.
For periodic calibration verification, CI SEMI also offers in situ calibration procedures using dedicated reference sources such as Equi T, supporting maintenance, troubleshooting, and chamber-to-chamber matching.
What happens when emissivity changes during processing?
NTM DeLTA simultaneously measures wafer thermal emission and emissivity at the same point on the wafer and along the same optical path. Real time emissivity compensation enables accurate wafer temperature measurement throughout changing process conditions without relying on fixed emissivity assumptions.
